Replication of polymer microstructure in energy control mode using ultrasonic embossing

Abstract:

Ultrasonic embossing is a new replication technique for polymer microstructures, and it is difficult to control the embossing process, and the process window is very narrow. Aiming at solving this kind of problem, energy control mode for ultrasonic embossing is proposed in this paper. PMMA was selected as the substrate, and embossing experiments based on energy control mode and time control mode were carried out. The results show that, in the energy control mode, under the condition of heat-assisted temperature 65 ℃, ultrasonic pressure 400 N, ultrasonic amplitude 11.4 μm and ultrasonic energy range from 700 J to 1 000 J, the depth replication rate was better than 92％. The temperature test experiments for heat affected zone show that, using the similar embossing parameters, the peak temperature in energy control mode is low and the temperature over the glass transition point is long. And this is the main reason for energy control mode has wider processing window which makes the process more controllable.