光学元件亚表面损伤深度的无损荧光检测方法

Nondestructive fluorescence detection method for subsurface damage depth of optics

摘要:

为了实现光学元件亚表面损伤的低成本、快速、准确检测，提出一种光学元件亚表面损伤深度无损荧光检测方法.在研磨和抛光加工过程中添加纳米荧光量子点溶液作为标记物，量子点受到激发光辐照后能够产生荧光现象，然后利用激光共聚焦显微镜进行逐层扫描以获取被测样品不同深度处的切片图像，当扫描深度达到某一特定值时，荧光强度开始由强变弱，通过特征点荧光强度的变化最终确定光学元件的亚表面损伤深度.自行开发了亚表面损伤深度无损检测软件，检测软件具有图像阈值处理、亮点自动识别、图像显示和曲线表征等功能，可以实现光学元件亚表面损伤深度的快速无损检测.将无损检测结果与损伤性检测结果进行了对比分析，结果表明两种检测方法相对误差在10%以内，验证了提出的无损荧光检测方法的有效性.

Abstract:

A nondestructive detection method of subsurface damage depth was proposed, in which nano-fluorescent quantum dots were added as marker in grinding and polishing process, and the quantum dots were excited by light and produced fluorescence, then the slice images of the samples at different depths were obtained by laser confocal microscopy. When the scanning depth reached a certain value, the fluorescence intensity became weak and the subsurface damage depth was determined by fluorescence intensity change of the feature points. A nondestructive detection software of subsurface damage depth, which has functions of image threshold processing, bright spot automatic recognition, image display and curve characterization, is developed and it can realize the rapid detection of subsurface damage depth. The results of non-destructive detection and damage detection were compared, and it showed that the relative error between the two detection methods was less than 10%, which verified the effectiveness of the proposed method.