带驻留约束的双臂集束型设备群的调度方法

Scheduling method for dual-blade multi-cluster tools with residency constraints

摘要:

为提高集束型设备群的生产效率,在考虑加工不同种类晶圆条件下,研究带驻留约束的双臂集束型设备群的建模与调度问题．提出虚拟缓冲模块概念,引入时间区间集来描述系统的运行状态,并以此建立调度问题的非线性规划模型；结合数学模型,提出一种以时间区间集为核心的基于虚拟缓冲模块概念和交换策略的调度算法；对所提出的算法进行了仿真分析．结果表明: 所构建的算法运行时间短,调度1个Lot数量的晶圆仅仅需要0.5 s左右,响应时间快；与研究问题域的下界比较,算法的结果接近下界；当设备因子大于5时,周期延长率R已经全部小于0.05,取得了较好的调度效果,表明算法是可行且有效的．

Abstract:

To improve the production efficiency of multi-cluster tools, modeling and scheduling problems of dual-blade multi-cluster tools with residency constraints and multi-type wafers were researched. Firstly, based on the proposed conception of virtual buffer modules, time interval sets were introduced to characterize the running states of the system. Then a non-linear mathematical model of the problems was formulated, and a scheduling algorithm was presented based on the conception of virtual buffer modules and the swap scheduling strategy. Finally, experiments were carried out to evaluate the proposed algorithm. Results indicated that, when scheduling a lot wafers, the running time of the constructed algorithm is only about 0.5 seconds, and the response time of the algorithm is also quick. Comparing a lower bound of the research problem domain, solutions are close to the lower bound. When the device factor is greater than 5, the cycle elongation R is less than 0.05. The algorithm achieves good results.