超大口径凹非球面反射镜的动态干涉测量技术

Dynamic interference testing technology of extra-large concave aspheric mirrors

摘要:

为了克服超长光路造成的振动和大气扰动的影响,采用动态干涉测量结合补偿法进行超大口径凹非球面的精密检测.通过分析超大口径凹非球面反射镜检测的难点,采用动态干涉仪克服检测中振动和大气扰动,并利用Zemax光学设计软件,以口径3.5m的凹非球面反射镜为例设计了干涉补偿光路.误差分析结果表明,采用动态干涉仪和补偿法进行超大口径凹非球面反射镜面形检测,不仅可以克服振动和大气扰动的影响,还能达到λ/90以上的检测精度.

Abstract:

To deal with the vibration and turbulence due to the long optical paths in extra-large concave aspheric mirrors testing,the dynamic interferometer associated with compensators is advanced.The difficulties in large concave aspheric mirrors testing are studied in this paper.Dynamic interferometer is employed to deal with vibration and air turbulence.Using the optical design software Zemax,compensators with 3.5 m aperture are designed as an example for concave aspheric mirror testing.Tolerance analysis indicates that the precision of this testing method is better than λ/90.