SAPMAC法蓝宝石单晶的生长、检测与超声震动加工

Growth,quality inspection and ultrasonic vibration cutting of large size sapphire grown by SAPMAC method

摘要:

分析SAPMAC法生长大尺寸蓝宝石晶体的工艺技术,并对制备的晶体质量进行了检测与分析.研究结果表明:采用SAPMAC法生长的蓝宝石晶体结构完整,FHWM值很小,只有11arcsec;缺陷密度在102/cm2水平,纯度高于99.995%,常温下晶体在3～5μm波段红外透过率高于85%;用超声振动加工技术对大尺寸蓝宝石单晶进行加工,设计了专用金刚石磨削复合刀具,提高了加工效率.

Abstract:

In this paper,the technology of large size sapphire grown by SAPMAC method is elaborated and the quality of the obtained crystal has been inspected and analyzed.Results indicate that the crystal structure is complete and the FHWM value is only 11 arcsec.The defect concentration is in the 10 2 /cm 2 level,the purity is higher than 99.995%,and the transmission in 3-5μm band is greater than 85%.Ultrasonic vibration machining is used to process the large size sapphire and a special grinding composite cutting tool is designed to improve its efficiency.