Elastic Model of Flexure-Based Linkage under Motion Constrains and External Load

Peibo Li; Jihao Liu; Tianzi Zhao; Helei Zhu; Yanzheng Zhao

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Supervised by Ministry of Industry and Information Technology of The People's Republic of China Sponsored by Harbin Institute of Technology Editor-in-chief Yu Zhou ISSNISSN 1005-9113 CNCN 23-1378/T

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Related citation:

Peibo Li,Jihao Liu,Tianzi Zhao,Helei Zhu,Yanzheng Zhao.Elastic Model of Flexure-Based Linkage under Motion Constrains and External Load[J].Journal of Harbin Institute Of Technology(New Series),2021,28(3):17-27.DOI:10.11916/j.issn.1005-9113.19058.

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Elastic Model of Flexure-Based Linkage under Motion Constrains and External Load

Author Name	Affiliation
Peibo Li	School of Mechanical Engineering, Donghua University, Shanghai 201620, China
Jihao Liu	State Key Lab of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
Tianzi Zhao	State Key Lab of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
Helei Zhu	College of Mechanical and Electrical Engineering, Jiaxing University, Jiaxing 314001, Zhejiang, China
Yanzheng Zhao	State Key Lab of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China

Abstract:

[ST5"BZ]For a flexible mechanism with several-stage flexible linkage, the flexible linkage is equivalent to work under the actions of an external load and motion constrains. This paper aims to deal with a simplified elastic model on the kinematic characteristics of a flexure-based linkage under these conditions. The elastic modeling method was developed based on motion constrains and the elastic beam theorem (EBT). Effects of a constant force, an elastic force with a constant stiffness, and the materials were taken into account. The proposed modeling method was verified by comparing with the finite element method (FEM). Further, the developed modeling method was used to optimize a flexure-based mechanism based on a two-stage flexible linkage to realize a maximum displacement amplification ratio of 6.56. The flexure-based mechanism was employed to drive a miniature sucker, which performed with a negative pressure of 2.45 kPa at a frequency of 13.2 kHz.

Key words: elastic model bridge-type mechanism kinematic characteristics

DOI：10.11916/j.issn.1005-9113.19058

Clc Number:TH12

Fund:

Descriptions in Chinese:

一种面向运动约束与负载作用下柔性连杆的弹性模型

李培波¹，刘积昊²，赵天兹²，朱荷蕾³，赵言正²

（1 东华大学机械工程学院，上海 201620；

2 上海交通大学机械系统与振动国家重点实验室，上海 200240；

3 嘉兴学院机械电子工程学院，浙江嘉兴 314001）

创新点说明：

1）提出一种用于描述运动约束下的柔性铰链基柔性连杆在外部负载作用下的运动特性的简化弹性模型。

2）提出一种基于柔性连杆机构的微型柔性位移放大机构，用于提高薄膜微泵吸盘负压吸附力。

研究目的：

根据柔性机构设计与应用要求，为简化柔性机构优化分析难度提出一种面向运动约束与外部负载作用下的柔性连杆运动性能分析简化建模方法，用于优化柔性机构的位移放大比、输入刚度、机械传递效率等运动性能，利用该建模方法设计优化一种用于增强薄振动的柔性位移放大机构。

研究方法：

1. 基于欧拉-伯努利弹性梁理论与对称机构的位移约束条件，建立运动位移约束与外力负载约束下的柔性连杆运动性能模型

2. 利用ANSYS有限元软件静态结构仿真验证所提出的弹性建模方法。

3. 采用MEMS工艺加工出样机，利用压电致动器驱动，同时采用点激光位移传感器测量机构的输出位移。

4. 采用负压传感器通过测量集成微型机构的微泵吸盘负压吸附特性。

结果：

1）根据与有限元仿真的对比法向，提出的弹性模型能够有效的反映出柔性连杆

2）采用MEMS工艺加工的的微型位移放大机构和薄膜微泵吸盘具有紧凑的尺寸，位移放大机构尺寸：直径15 mm，厚度0.5 mm，重量：0.17 g，薄膜微泵吸盘尺寸：直径15 mm，高度：2.7 mm。

3）柔性机构的位移放大比为6.56。

4）薄膜微泵吸盘在致动器固有频率13.2 kHz产生最大负压吸附压强2.45 KPa。

结论：

1）提高柔性机构中柔性铰链的转动柔度，可以提高柔性放大机构的位移放大比，但是会导致机构的负载性能下降，柔性铰链柔度过高会导致机构在外部负载作用下的运动性能退化。

2）柔性放大机构的负载能力与输入刚度与材料弹性模量正相关，采用高弹性模量材质的柔性机构负载能力较强，但是会导致机构的机械能传递效率下降。

3）基于微型薄膜微泵的仿生负压吸盘具有结构紧凑、质量轻等优点，MEMS工艺适用于大批量生产作业，可用作微型负压吸附机构。

关键词：弹性模型，柔性机构，运动学性能

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